10/12/2010	9:04:43 AM	Bypass valve closed
10/12/2010	9:04:43 AM	Main Vac valve closed
10/12/2010	9:05:12 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/12/2010	9:05:12 AM	Recipe started at 9:05 AM
10/12/2010	9:05:12 AM	H2 valve closed
10/12/2010	9:05:12 AM	BCl3 valve closed
10/12/2010	9:05:12 AM	PH3 valve closed
10/12/2010	9:05:12 AM	SiCl4 pre valve closed
10/12/2010	9:05:12 AM	SiCl4 post valve closed
10/12/2010	9:05:12 AM	Main Vac valve closed
10/12/2010	9:05:12 AM	Bypass valve closed
10/12/2010	9:05:12 AM	Bubbler valve closed
10/12/2010	9:05:12 AM	Helium valve opened
10/12/2010	9:05:12 AM	Helium MFC set to  500.000000
10/12/2010	9:05:12 AM	H2 MFC set to  0.000000
10/12/2010	9:05:12 AM	BCl3 MFC set to  0.000000
10/12/2010	9:05:12 AM	PHl3 MFC set to  0.000000
10/12/2010	9:05:12 AM	SiCl4 MFC set to  0.000000
10/12/2010	9:05:12 AM	Bypass solenoid MFC set to  0.000000
10/12/2010	9:05:12 AM	Tube furnace set to 0
10/12/2010	9:06:31 AM	Helium valve closed
10/12/2010	9:06:31 AM	H2 valve closed
10/12/2010	9:06:31 AM	BCl3 valve closed
10/12/2010	9:06:31 AM	PH3 valve closed
10/12/2010	9:06:31 AM	SiCl4 pre valve closed
10/12/2010	9:06:31 AM	SiCl4 post valve closed
10/12/2010	9:06:31 AM	Main Vac valve closed
10/12/2010	9:06:31 AM	Bypass valve closed
10/12/2010	9:06:31 AM	Bubbler valve closed
10/12/2010	9:06:31 AM	Helium MFC set to  0.000000
10/12/2010	9:06:31 AM	H2 MFC set to  0.000000
10/12/2010	9:06:31 AM	BCl3 MFC set to  0.000000
10/12/2010	9:06:31 AM	PHl3 MFC set to  0.000000
10/12/2010	9:06:31 AM	SiCl4 MFC set to  0.000000
10/12/2010	9:06:31 AM	Bypass solenoid MFC set to  0.000000
10/12/2010	9:06:31 AM	Tube furnace set to 0
10/12/2010	9:06:32 AM	Run finished at 9:06 AM
10/12/2010	9:06:32 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/12/2010	9:11:00 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/12/2010	9:11:01 AM	Recipe started at 9:11 AM
10/12/2010	9:11:01 AM	Helium valve closed
10/12/2010	9:11:01 AM	H2 valve closed
10/12/2010	9:11:01 AM	BCl3 valve closed
10/12/2010	9:11:01 AM	PH3 valve closed
10/12/2010	9:11:01 AM	SiCl4 pre valve closed
10/12/2010	9:11:01 AM	SiCl4 post valve closed
10/12/2010	9:11:01 AM	Main Vac valve closed
10/12/2010	9:11:01 AM	Bubbler valve closed
10/12/2010	9:11:01 AM	Bypass valve opened
10/12/2010	9:11:01 AM	Helium MFC set to  0.000000
10/12/2010	9:11:01 AM	H2 MFC set to  0.000000
10/12/2010	9:11:01 AM	BCl3 MFC set to  0.000000
10/12/2010	9:11:01 AM	PHl3 MFC set to  0.000000
10/12/2010	9:11:01 AM	SiCl4 MFC set to  0.000000
10/12/2010	9:11:01 AM	Bypass solenoid MFC set to  0.000000
10/12/2010	9:11:01 AM	Tube furnace set to 0
10/12/2010	9:11:48 AM	Helium valve closed
10/12/2010	9:11:48 AM	H2 valve closed
10/12/2010	9:11:48 AM	BCl3 valve closed
10/12/2010	9:11:48 AM	PH3 valve closed
10/12/2010	9:11:48 AM	SiCl4 pre valve closed
10/12/2010	9:11:48 AM	SiCl4 post valve closed
10/12/2010	9:11:48 AM	Bubbler valve closed
10/12/2010	9:11:48 AM	Main Vac valve opened
10/12/2010	9:11:48 AM	Bypass valve opened
10/12/2010	9:11:48 AM	Helium MFC set to  0.000000
10/12/2010	9:11:48 AM	H2 MFC set to  0.000000
10/12/2010	9:11:48 AM	BCl3 MFC set to  0.000000
10/12/2010	9:11:48 AM	PHl3 MFC set to  0.000000
10/12/2010	9:11:48 AM	SiCl4 MFC set to  0.000000
10/12/2010	9:11:48 AM	Bypass solenoid MFC set to  0.000000
10/12/2010	9:11:48 AM	Tube furnace set to 0
10/12/2010	9:11:48 AM	Run finished at 9:11 AM
10/12/2010	9:11:48 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/12/2010	10:04:09 AM	Helium valve opened
10/12/2010	10:04:12 AM	Helium MFC set to  100.000000
10/12/2010	10:04:33 AM	Helium valve closed
